顯影蝕刻連退膜機

設備主要特點/Features：
1、透明玻璃設計便于觀察生產情況
Transparent glass is adopted for convenient observing the producing status.
2、蝕刻線寬線距：2mil/2mil，蝕刻均勻度C.O.V≥92%,蝕刻因子≥5
Etching Line Width/Distance:2mil/2mil, Etching Evenness C.O.V≥92%, Etching Gene≥5
3、精密補償蝕刻設計，有效控制水池效應，提高做板均勻性
Precision compensation etching design that it is effective to control the puddle effect and improve the evenness of
the panel.
4、退膜采用噴淋系統、藥液循環系統以及接渣系統獨特設計，膜渣去除率達98%以上
Spraying system, medicine circulation system and unique design of dregs-collection system are used in film stripping
module to get the dreg removal rate up to 98 percent.
工藝流程/Schematic：
入板→顯影→新液洗→沖污水→循環水洗→檢查→補償蝕刻→蝕刻→循環水洗→檢查→退膜→沖污水→循環水洗→酸洗→
循環水洗→干板組合→出板
Input→Developing→Fresh Solution→Waste Wr→Circulation Wr/s→Inspection→Compensated Etching→Etching→Circulation
Wr/s→Inspection→Film Stripping→Waste Wr→Circulation Wr/s→Acid Rinse→Circulation Wr/s→Drying Module→Output

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